ITO sputtering targets are made by mixing indium oxide and tin oxide powders in a certain proportion, processing them through a series of manufacturing processes, and then…
Blackish-gray ceramic semiconductor formed by high-temperature atmosphere sintering (1600 degrees Celsius, oxygen sintering).
Our company has introduced advanced design concepts from abroad and combined them with practical domestic production experience to develop a high-performance ITO sputtering furnace. This furnace solves the most challenging part of sputtering production—sintering—significantly improving product yield. The equipment boasts an internal oxygen purity exceeding 99.5%, maintaining a consistently slightly positive pressure atmosphere. It integrates degreasing and sintering, greatly saving energy and shortening the production cycle. The furnace temperature uniformity is generally within ±5℃, not exceeding ±10℃. The trolley uses a four-axis integrated sliding rail lifting system, ensuring safety and aesthetics. An optional equipment for treating organic gases generated during degreasing, which we call a waste gas purification furnace, can be added, providing employees with a healthy working environment and contributing to national environmental protection.
■ Firing of fine ceramics, electronic components, magnetic materials, and target materials.
| Item\Model | RB-18/1507585/Q (Customizable Specification) |
| Long-term Operating Temperature | 1650℃ (Max. 1700℃) |
| Power Supply | 380V±10%, 50Hz±5%, 180kW |
| Loading Dimension | Max. effective height of sintered tube target: 1400mm |
| Max. effective length of sintered flat target: 3200mm | |
| Various loading dimensions can be customized according to customer requirements | |
| Atmosphere | Oxygen or Nitrogen (Purity 99.5%), multiple air inlets, adjustable flow rate |
| Furnace Body Material | Polycrystalline Mullite Ceramic Fiber Board |
| Heating Element | 1800 Molybdenum Disilicide Rod |
| Thermocouple | Type B Platinum-Rhodium Thermocouple |
| Temperature Uniformity | ±10℃ |
| (Tested in 1400L×650W×750H uniform temperature zone, empty furnace state, holding at 1650℃ for 2 hours, 9-point temperature measurement) | |
| Heating-up Time | 0~1650℃/4hr (Programmable Control) |
| Temperature Control Mode | Instrument + SCR Control, Touch Screen Control, Fully Automatic Operation |
